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HARTA3-4 |
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HARTA3-4 probes are silicon probes designed for imaging or trench depth metrology, with a tilt compensation of 3 degrees. The spike width of these probes is approximately 200 nm at 4 µm, making them ideally suited for features up to 4 µm deep. These probes also have Aluminum coating on the reflex side to increase laser signal quality.
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Tip Specifications |
| Material: Silicon |
| Shape: Tetrahedral |
| Height (µm): 14-16 |
| Aspect Ratio: 5.0-10 |
| ROC* (nm): 30 |
| Coating: None |
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* Nominal specification; guaranteed < 30 nm |
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Cantilever Specifications
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Material: Silicon |
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Shape: Rectangular |
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Reflex Coating: Al, 30 nm ± 5 |
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Spike Specifications |
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Tilt Compensation: 3° |
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Length (µm): 4.0 |
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Width (nm): 400
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HARTA3-4.pdf
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Parameter |
Nominal Value |
Minimum Value |
Maximum Value |
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Spring Constant (N/m) |
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40 |
25 |
75 |
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300 |
200 |
400 |
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125 |
115 |
135 |
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35 |
30 |
40 |
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4.5 |
4.0 |
5.0 |
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Frequency (kHz) |
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Length (µm) |
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Width (µm) |
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Thickness (µm) |
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Ordering Information: |
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Part Number |
No. of Probes
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Pricing |
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HARTA3-4-5 |
5 |
$771 |
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HARTA3-4-50 |
50 |
$6,611 |
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For further information or to place an order, please contact your
local distributor or contact
Applied NanoStructures directly.
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