Silicon Probes
Applied NanoStructures silicon probes are manufactured out of prime grade, low resistivity n-type Antimony doped, single crystal silicon. Our well-established silicon technology combined with our novel micro-fabrication processes are the key ingredients for achieving high quality monolithic probes with unprecedented tip sharpness. We have many standard silicon probe series designed for a wide variety of applications.
Doped Diamond Probes
AppNano Doped Diamond Probes offers a unique combination of hardness and conducting tip. The tip side of these probes is coated with polycrystalline diamond. The diamond film is in-situ doped with boron to make it highly conducting. The reflex side of the cantilever is coated with Aluminum. These probes are nanofabricated using highly doped single crystal silicon with unparalleled reproducibility and robustness.
Tip Specifications
- Material: Silicon
- Shape: Triangular Pyramid
- Height (µm): 14-16
- ROC (nm): 100 - 300
- Resistivity (Ohm-cm):0.025
Cantilever Specifications
- Material: Silicon
- Shape: Rectangular
- Front Coating: 100nm Doped Diamond
- Reflex Coating: Aluminum
- Alignment Grooves: YES
ACCESS™ Probes
AppNano ACCESS™ probes are sharp silicon probes that allow a direct optical view of the AFM tip and designed for applications that require seeing the tip as it engages the surface.
- Frequency (kHz): 300
- Length (µm): 160
- Spring Constant (N/m): 93
ACL silicon probes are designed for tapping / non-contact mode applications. These probes feature a long, thin cantilever that allows for greater laser clearance than our standard ACT model.
Base Specifications:- Length (µm): 225
- Spring Constant (N/m): 45
- Frequency (kHz): 190
- Options: A, SS, TL
ACST probes are silicon probes designed for non-contact or soft tapping mode applications. These probes are reasonably soft with a mid-range resonance frequency. ACST-SS probes have a super sharp tip, and ACST-TL are tipless.
Base Specifications:- Length (µm): 150
- Spring Constant (N/m): 7
- Frequency (kHz): 150
ACT probes are silicon probes designed for tapping / non-contact mode applications. These probes feature a short cantilever.
Base Specifications:- Length (µm): 125
- Spring Constant (N/m): 40
- Frequency (kHz): 300
- Options: A, SS, TL
ANSCM Series
ANSCM probes are silicon probes with a thin layer of Pt/Ir coating on both the reflex and tip sides of the probes. These probes are ideal for Electrical Force Microscopy (EFM) applications, and are available for use in several different modes.
FCL Series
FCL Series consists of tipless force calibration probes, each with five cantilevers. These probes are designed for the spring constant calibration of SPM probes.
Base Specifications:- Length (µm): 52-442
- Spring Constant (N/m): 0.12-77
- Frequency (kHz): 14-1000
FORT probes are specially designed for force calibration mode applications. These probes have a medium frequency and spring constant that make them ideally suited for Force Modulation Microscopy.
Base Specifications:- Length (µm): 225
- Spring Constant (N/m): 3.0
- Frequency (kHz): 62
- Options: A, G, GG, SS, TL
High Aspect Ratio (HART) probes are fabricated from highly doped, monolithic silicon. These HART probes have been designed for Trench Depth Metrology: each probe tip contains a spike of a specific length that is fine-tuned to measuring depth in tapping / non-contact mode. We offer various spike lengths and tilt compensations for imaging features up to 6 µm deep.
Base Specifications:- Length (µm): 125
- Spring Constant (N/m): 40
- Frequency (kHz): 300
MAGT Series
MAGT probes are silicon probes specially designed for Magnetic Force Microscopy (MFM) applications. Both the reflex and tip sides have a layer of magnetic coating. Our MAGT probes vary in coercitivity and moment to match different MFM requirements.
Base Specifications:- Length (µm): 225
- Frequency (kHz): 62
- Spring Constant (N/m): 3.0
SHOCON probes are fabricated from highly doped, monolithic silicon, and feature shorter cantilevers than our SICON Series. SHOCON probes are ideal for contact mode applications.
Base Specifications:- Length (µm): 225
- Options: A, G, GG, SS, TL
- Spring Constant (N/m): 0.16
- Frequency (kHz): 23
SICON probes are fabricated from highly doped, monolithic silicon, and feature longer cantilevers than the SHOCON Series. SICON probes are designed for contact mode applications.
Base Specifications:- Length (µm): 450
- Options: A, G, GG, SS, TL
- Spring Constant (N/m): 0.29
- Frequency (kHz): 17


