Model : ANSCM-PT
Type: Pt Coated Electrostatic Force Mode Probes
Substrate Specifications
Material: Single Crystal Silicon, N-type, 0.01 -0.025Ω-cm, Antimony doped
Size ( LxWxT) : 3.4mm X 1.6 mm X 300 µm
|
Shape |
Tetrahedral |
|
|
Height ( µm) |
14 - 16 |
|
|
Radius of Curvature (nm) |
Typ |
Max |
|
50 |
60 |
|
|
Tip offset ( µm) |
5 - 20 |
|
|
Aspect Ratio |
2:1 - 3:1 |
|
|
Front Plane angle |
10° ± 2° |
|
|
Back Plane Angle |
30° ± 2° |
|
|
Side Angle ( half) |
18° ± 2° |
|
|
Coating |
Ti/Pt 3nm/50nm |
|
Various metal also available as special order item.
|
Material |
Silicon |
|
Shape |
Rectangular |
|
Cross-section |
Trapezoidal |
|
No. of cantilevers |
1 |
|
Front side coating |
Ti/Pt 3nm/50nm |
|
Back side coating |
Ti/Pt 3nm/50nm |
|
|
Typical |
Min. |
Max |
|
Frequency (kHz) |
60 |
50 | 70 |
|
Spring Const. ( N/m) |
3 |
1 | 5 |
|
Thickness ( µm) |
2.5 |
2.0 | 3.0 |
|
Length ( µm) |
225 |
215 | 235 |
|
Width ( µm) |
32 |
27 | 37 |