Model # BECAL
E-beam and Optical Edge Calibration Grid
Description: Applied NanoStructures’ BECAL product is designed as a knife edge calibration standard. The grid is made with Silicon coated with Platinum. The size and shape of the grid can be varied to fit different applications.
Specifications:
|
|
Parameter |
Typical Value |
Range |
|
Chip
|
Thickness (µm) |
400 |
380-420 |
|
Width and Length (µm) |
7150x7150 |
7000-7300 |
|
|
Grid
|
Thickness (µm) |
2 |
1.5-2.5 |
|
Window Size (µm) |
3x3 |
540-660 |
|
|
Edge Roughness (nm) |
> 2nm over 200nm |
||
|
Coating |
Platinum 30nm |
||
