Model: FCL
Type: Force Calibration Cantilever Probes
Substrate Specifications
Material: Single Crystal Silicon, N-type, 0.01 -0.025Ω-cm, Antimony doped
Size ( LxWxT) : 3.4mm X 1.6 mm X 300 µm
|
Material |
Silicon |
|
Shape |
Rectangular |
|
Cross-section |
Trapezoidal |
|
No. of cantilevers |
1 |
|
Front side coating |
None |
|
Back side coating |
None |
|
Shape |
Frequency ( kHz) |
Spring Constant (N/m) |
Thickness (µm) |
Length (µm) |
Width (µm) |
||||||||||
|
Typ |
Min |
Max |
Typ |
Min |
Max |
Typ |
Min |
Max |
Typ |
Min |
Max |
Typ |
Min |
Max |
|
|
A |
14 |
13 |
16 |
0.12 |
0.08 |
0.18 |
2.0 |
1.8 |
2.2 |
442 |
440 |
445 |
32 |
31.5 |
33 |
|
B |
60 |
52 |
66 |
0.98 |
0.7 |
1.5 |
2.0 |
1.8 |
2.2 |
218 |
216 |
220 |
32 |
31.5 |
33 |
|
C |
300 |
260 |
350 |
12 |
8 |
18 |
2.0 |
1.8 |
2.2 |
96 |
94 |
98 |
32 |
31.5 |
33 |
|
D |
550 |
470 |
650 |
30 |
20 |
45 |
2.0 |
1.8 |
2.2 |
71 |
69 |
73 |
32 |
31.5 |
33 |
|
E |
1000 |
860 |
1200 |
77 |
49 |
118 |
2.0 |
1.8 |
2.2 |
52 |
50 |
54 |
32 |
31.5 |
33 |