Model :  HART12

Type: High Aspect Ratio Probes – 12 Degree Tilt Compensation
 

Substrate Specifications

 Material: Single Crystal Silicon, N-type, 0.01 -0.025Ω-cm, Antimony doped

Size ( LxWxT) : 3.4mm X 1.6 mm X 300 µm

 
Tip Specifications

 

Shape

Tetrahedral

Tip Height ( µm)

14 - 16

Radius of Curvature (nm)

10

Tip offset ( µm)

5 - 20

Aspect Ratio*

5:1 - 10:1

Spike  Angle ( Sθ)

12°

Spike Length( SL)*

0.5 µm – 6.5µm

Spike Width( SW)*

100nm – 400nm

Coating

None

 
 
Probe Options

-A

Reflex Coating (Aluminum)

-1

0.5-1.5 µm Spike

-2

1.5-2.5 µm Spike

-4

3.5-4.5 µm Spike

-6

5.5-6.5 µm Spike

 

   
Cantilever Specifications

Material

Silicon

Shape

Rectangular

Cross-section  

Trapezoidal

No. of cantilevers

1

Front side coating

None

Back side  coating

None
 
 
Cantilever Parameters

 

Typical

Min.

 Max

Frequency (kHz)

300

 200 400

Spring Const. ( N/m)

40

 25 75

Thickness ( µm)

4.0

 3.5 4.5

Length  ( µm)

125

 115 135

Width  ( µm)

35

 30 40
 
   
Ordering Info

Part Number

Short Description, Spike Length ( SL) X Width ( SW),

Probes / Pk

HART12-1-5

12° Tilt, HAR Probes,  1 µm X 100 nm ,

5

HART12-1-50

12° Tilt, HAR Probes,  1 µm X 100 nm ,

50

HART12-2-5

12° Tilt, HAR Probes,  2 µm X 100 nm ,

5

HART12-2-50

12° Tilt, HAR Probes,  2 µm X 100 nm ,

50

HART12-4-5

12° Tilt, HAR Probes,  4 µm X 200 nm ,

5

HART12-4-50

12° Tilt, HAR Probes,  4 µm X 200 nm ,

50

HART12-6-5

12° Tilt, HAR Probes,  6 µm X 400 nm ,

5

HART12-6-50

12° Tilt, HAR Probes,  6 µm X 400 nm ,

50

 
 
Data Sheet  
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