Model: HYDRA6V-100
Type: AC/ Non-Contact Mode Nitride Probes –V Cantilever
Substrate Specifications
Material: Single Crystal Silicon, N-type, 0.01 -0.025Ω-cm, Antimony doped
Size ( LxWxT) : 3.4mm X 1.6 mm X 300 µm
|
Shape |
Tetrahedral |
|
|
Height ( µm) |
4.0-6.0 |
|
|
Radius of Curvature (nm) |
Typ |
Max |
|
10 |
15 |
|
|
Tip offset ( µm) |
4-8 |
|
|
Aspect Ratio |
2:1 - 3:1 |
|
|
Front Plane angle |
10° ± 2° |
|
|
Back Plane Angle |
35° ± 2° |
|
|
Side Angle ( half) |
19° ± 2° |
|
|
Coating |
None |
|
|
G |
Gold Coating (Back Side) |
|
-GG |
Gold Coating (Both Sides) |
|
-TL |
Tipless |
|
Material |
Silicon |
|
Shape |
V-Shape |
|
Cross-section |
Rectangular |
|
No. of cantilevers |
1 |
|
Front side coating |
None |
|
Back side coating |
None |
|
|
Typical |
Min. |
Max |
|
Frequency (kHz) |
66 |
61 | 75 |
|
Spring Const. ( N/m) |
0.035 |
0.292 | 0.405 |
|
Thickness ( µm) |
0.6 |
0.55 | 0.65 |
|
Length ( µm) |
100 |
90 | 110 |
|
Width ( µm) |
21 |
18 | 24 |