Model # TL
Tipless Probe
Substrate Specifications
Material: Single Crystal Silicon, N-type, 0.01 -0.025Ω-cm, Antimony doped
Size ( LxWxT) : 3.4mm X 1.6 mm X 300 µm
|
Material |
Silicon |
|
Shape |
Rectangular |
|
Cross-section |
Trapezoidal |
|
No. of cantilevers |
1 |
|
Front side coating |
None |
|
Back side coating |
None |
|
-A |
Reflex Coating (Aluminum) |
|
-G |
Gold Coating (Back Side) |
|
-GG |
Gold Coating (Both Sides) |
|
|
Typical | Min. |
Max |
|
Frequency (kHz) |
190 |
145 | 230 |
|
Spring Const. ( N/m) |
48 |
20 | 95 |
|
Thickness ( µm) |
7 |
6 | 8 |
|
Length ( µm) |
225 |
215 | 235 |
|
Width ( µm) |
43 |
38 | 48 |
| Typical | Min. |
Max |
|
|
Frequency (kHz) |
300 |
200 | 400 |
|
Spring Const. ( N/m) |
40 |
25 | 75 |
|
Thickness ( µm) |
4.0 |
3.5 | 4.5 |
|
Length ( µm) |
125 |
115 | 135 |
|
Width ( µm) |
40 |
35 | 45 |
| Typical | Min. |
Max |
|
|
Frequency (kHz) |
60 |
50 | 70 |
|
Spring Const. ( N/m) |
3 |
1 | 5 |
|
Thickness ( µm) |
2.5 |
2.0 | 3.0 |
|
Length ( µm) |
225 |
215 | 235 |
|
Width ( µm) |
32 |
27 | 37 |
| Typical | Min. |
Max |
|
|
Frequency (kHz) |
12 |
11 | 18 |
|
Spring Const. ( N/m) |
0.2 |
0.1 | 0.6 |
|
Thickness ( µm) |
2.5 |
2.0 | 3.0 |
|
Length ( µm) |
450 |
425 | 457 |
|
Width ( µm) |
45 |
40 | 50 |