HART probes are used for deep trench metrology applications. Different SPM/AFM manufacturer’s use different mounting angles for the probe, AppNano would provide different mounting angles to compensate for the tilt so that the spike is perpendicular to the surface for deep trench metrology applications. We can also make custom HART probes to meet specific requirements, please contact us for your custom requirements.
STEPS to choose a specific HART probe:
1 Choose tilt compensation:
0°
3°
12°
2 Choose spike length (µm):
1
2
4
6
3 Choose coating options (Reflex side):
None
Al
4 Choose # probes per box (Standard sizes):
5/box
50/box