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Step Height Standard (SHS)

  • Our multipurpose Nanuler Calibration Standard is designed for calibration of AFM, SEM, Optical and Mechanical Profilers

  • Features include step heights, lines, grids, magnification box and spot measurement structures of different pitch

  • The features are etched into SiO₂ and Si and are optionally available with metal coating for improved reflectivity and reduced static charge

Step Height

Desctiption

Part Number

Price

Quantity

100 nm

SiO2 Step

STEP-OX-0.1

$365

100 nm

SiO2 Step mounted on Quartz

STEP-OX-0.1-Q

$465

100 nm

SiO₂ Step mounted on Metal

STEP-OX-0.1-D

$385

100 nm

SiO₂ Step Metal coated

STEP-OX-0.1-M

$385

100 nm

SiO₂ Step metal coated and mounted on Quartz

STEP-OX-0.1-M-Q

$485

100 nm

SiO₂ Step metal coated and mounted on Metal

STEP-OX-0.1-M-D

$405

200 nm

SiO₂ Step

STEP-OX-0.2

$365

200 nm

SiO₂ Step mounted on Quartz

STEP-OX-0.2-Q

$465

200 nm

SiO₂ Step mounted on Metal

STEP-OX-0.2-D

$385

200 nm

SiO₂ Step Metal coated

STEP-OX-0.2-M

$385

200 nm

SiO₂ Step metal coated and mounted on Quartz

STEP-OX-0.2-M-Q

$485

200 nm

SiO₂ Step metal coated and mounted on Metal

STEP-OX-0.2-M-D

$405

Technical Specifications

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